The research in our group is focused on understanding and controlling intrinsic nanostructure, surface and interfacial chemistry of thin films and applying this knowledge to a range of problems in MEMS, nanotechnology, space crafts, and automobile. The microstructure of thin films dominates their macro-properties, such as mechanical, tribological behaviors; furthermore, the role of interfaces becomes increasingly important as system dimensions are scaled downward. For instance, most electronic and optoelectronic devices are undergoing rapid scaling, with lengths moving into the nanometer range and the surface to volume ratio becoming very large. Therefore, the functions of many next generation devices, particularly, MEMS/NEMS, definitely depend critically upon the ability to design the intrinsic nanostructure of thin films applied onto devices components and to control and modify the properties of their interfaces.