ZHANG Feng, ZHUGE Lan-jian, GAO Wei-jian
(Analysis and Testing Center, Soochow University, Suzhou 215123,China)
Abstract: The checking and removal methods for the HV troubleshooting caused by SF6 decomposition, and some experiences in daily maintenance on Tecnai G20 TEM are introduced.
Key words:TEM; HV; troubleshooting
E-mail: ylfengzhang@suda.edu.cn
Analysis and Testing Technology and Instruments, Vol. 18, No. 3, 2012,194-195