Abstract: The nano-indentation and friction/wear properties of CN_x film in CN_x/SiC /Ti (carbon nitride/silicon carbon/ti) multilayer thin films (SiC, Ti films as interlayer) deposited on Mg alloy (AZ91D) substrate using magnetron sputtering technique at room temperature were investigated. The results showed that the CN_x film exhibited a low nano-hardness (6. 67GPa) and Young’s modulus (54.68GPa) but a high ratio of hardness to modulus (0.122). When sliding against a Si₃N₄ (silicon nitride) ball using ball-on-disc friction and wear tester under dry sliding condition, the CN_x film exhibited good friction/wear properties, i. e. friction coefficient was about 0.162 and the special wear rate was in the order of magnitude of 10^-6mm³/ (m•N) without film cracking and delamination at interface after long sliding duration (3. 5h). It is believed that tribochemistry and high hardness-to-modulus ratio played key roles in friction reduction and wear resistance.

Key words: Mg substrate, thin films, nanoindentation, friction and wear, magnetron sputtering

Author: Xu Xiaojing, Professor, Institute of Advanced Forming Technology, Jiangsu University, Zhenjiang 212013, China

E-mail: xjxu67@ujs.edu.cn.

Tribology, Vol. 29, Issue 5, 2009, 432-436.