Abstract: Ti-Al-N films with various chemical compositions were fabricated on 4OCr steel by changing the relative substrate position to targets using double-targeted reactive magnetron sputtering in one same process. EDS, AFM and XRD were used to characterize the composition, roughness and microstructure of films. Tribological performance of films was tested in air without any lubricant on a UMT-3 multifunctional friction and wear tribometer. Chemical composition of films varied with substrate position from Ti0.82Al0.18N to Ti0.12Al0.88N. XRD results indicated that before heat treatment sputtered films were amorphous. However, different phases such as TIN, AIN and TIAIN were formed in films with different compositions after heat treatment of 700℃x1h. Surface roughness of films also indicated different growth modes of films with different chemical compositions. Friction and wear tests indicated the best tribological performance of films was obtained atx = 0.57, 0.65 because of its hard phase, smooth surface and transfer layer.

Key words: Ti-Al-N films, Reactive magnetron sputtering, wear mechanism, substructure Position, tribological performance

Author: Li Changsheng, Department of Material Science and Technology, Jiangsu University, Zhenjiang 212023, China

E-mail: lichangsheng@ujs.edu.cn

Tribology, Vol. 29, Issue 6, 2009, 518~525