WANG Chengbing1*, WANG Zhou2, ZHANG Junyan2
(1. National Engineering Research Center for Technology & Equipment of Green Coating, Lanzhou Jiaotong University, Lanzhou 730070, China 2. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China)
Abstract: Nitrogenated diamond-like carbon films were deposited onto Si substrates by Pulse-DC Plasma Enhanced Chemical Vapor Deposition (PECVD) system. X-ray Photoelectron Spectroscopy (XPS), Fourier Transform Infrared (FTIR) spectrometer and Scanning Electron Microscope (SEM) were utilized to characterize bond configuration and chemical state of the films. Tribological properties were tested on a UMT reciprocating tribometer. As the nitrogen content of carbon nitride films increased, the sp2 C content increased and the hardness decreased, while the average coefficient of friction of carbon nitride films increased.
Key words: diamond-like carbon; nitrogenated; tribology; mechanical property
E-mail: wangchengbing@gmail.com
Tribology, Vol. 32, Issue 1, 2012, 59~63
