YANG Baoping1, ZHENG Yu1,2, ZHANG Bin2, ZHANG Junyan2*
(1.Dapertment of Petrochemical Technology, Lanzhou University of Technology, Lanzhou 730050, China 2. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China)
Abstract: Due to the deposition of C on Si target during the deposition process, we can use this target poisoning phenomenon to deposit DLC film with trace or low Si, the Si-DLC films with different structures were prepared via different negative bias application. The structure, cross-sections, composition, mechanical and tribological properties of the films was systemically investigated by XPS, Raman spectra, scanning electron microscopy, nano-indenter and tribo-tester. The results show that the content of sp3 hybrid carbon was increased as the Si doped, and Si-doping could release the internal stress and increase adhesion to silicon substrate. The Si-DLC film prepared at bias of -600 V exhibited higher hardness, higher adhesion, lower friction coefficient about 0.018 and lower wear rate about 1.60×10-16 m3/(N·m) in the ambient atmosphere.
Key words: bias; magnetron sputtering; Si-DLC; tribological properties
E-mail: zhangjunyan@licp.cas.cn
Tribology, Vol. 32, Issue 6, 20132, 634~640
