Abstract
(CrAlTiNbV)Nx high-entropy nitride coatings are deposited via tuning nitrogen flow rates, and evaluating their influence on the microstructure, mechanical and tribological properties of the coatings. All deposited coatings exhibit columnar growth morphology and own a single face-center-cubic structure. As the nitrogen flow rate increases, the preferred orientation of the coating gradually transfers from (1 1 1) to (200) and (220), and then changes back to (1 1 1) with the nitrogen flow rate continues to increase. The S-38 sample possesses the optimal plastic deformation resistance and adhesion strength. Friction and wear results show that the (CrAlTiNbV)Nx coating deposited at nitrogen flow rate of 38 sccm owns the best tribological properties.

KeyWords Plus:MECHANICAL-PROPERTIES; SUBSTRATE-TEMPERATURE; FILMS; MICROSTRUCTURE; ALLOYS

Published in APPLIED SURFACE SCIENCE，Volume 557；10.1016/j.apsusc.2021.149813，AUG 15 2021