Abstract

The special needs of some fields, such as aerospace and semiconductor manufacturing, are stimulating research on conductive and lubricative materials. This study used magnetron sputtering technology to prepare NbSe2 functional films with metal-like conductivity and MoS2-like lubricity. The composition, structure, and performance of NbSe2 films deposited under different processes were systematically analyzed by a series of characterization methods. The results indicate that only suitable argon flow and bias voltage are conducive to promoting the crystallization and densification of the NbSe2 film, giving it high adhesion strength and low static contact resistivity. Compared with the traditional MoS2 film, the contact voltage of the optimized NbSe2 film is reduced by 3/4, and the wear rate is reduced by more than half under the current-carrying conditions. The friction and wear mechanisms of NbSe2 films under current-carrying conditions finally were revealed by analysis of friction contact interface behaviors. This NbSe2 film with both good lubricity and good conductivity will become an irreplaceable candidate for the development of multifunctional lubricating materials in response to emerging scenarios.

Keywords Plus：THIN-FILMS，MOS2，WEAR，TI，PERFORMANCE，DEPOSITION，MECHANISM，OXIDATION

Published in  ACS APPLIED MATERIALS & INTERFACES，Volume17；10.1021/acsami.5c13691，SEP 24 2025